Multi-layer Embedment of Conductive and Non-conductive Pdms for All-elastomer Mems
نویسندگان
چکیده
PDMS (polydimethylsiloxane) elastomer is widely used in MEMS. However, PDMS is non-conductive and as a result is used in mostly structural applications. We report methods for monolithic integration of conductive and non-conductive PDMS for realizing wholly polymer-based devices with embedded elastomer wires, electrodes, heaters, and sensors. In this work we demonstrate elastomer strain gauges, capacitive pressure sensors, as well as microfluidic channels with integrated heaters and sensors. The process uses a series of PDMS patterning, micromolding, and bonding techniques with conductive PDMS features made by mixing with multiwall carbon nanotubes (MWNT).
منابع مشابه
Highly elastic conductive polymeric MEMS
Polymeric structures with integrated, functional microelectrical mechanical systems (MEMS) elements are increasingly important in various applications such as biomedical systems or wearable smart devices. These applications require highly flexible and elastic polymers with good conductivity, which can be embedded into a matrix that undergoes large deformations. Conductive polydimethylsiloxane (...
متن کاملMultilayer Dielectric Elastomer Actuators with Ion Implanted Electrodes
We present the design, fabrication process and characterization of multilayer miniaturized polydimethylsiloxane (PDMS)-based dielectric elastomer diaphragm actuators. The conductive stretchable electrodes are obtained by lowenergy metal ion implantation. To increase force, decrease the required voltage, and avoid dielectric breakdown, we present here a technique to fabricate multilayer devices ...
متن کاملElectrically conductive fabric based stretchable triboelectric energy harvester
Stretchable conductive fabric-based triboelectric generator (TENG), to develop breathing/chest band for harvesting energy at low frequency has been developed. Stretchable conductive nylon-fabric and carbon-based elastomer composites were used as electrodes. During this work, film casting technique was implemented and combination of different materials, such as, polydimethylsiloxane (PDMS) and p...
متن کاملRapid patterning of slurry-like elastomer composites using a laser-cut tape
We present a cleanroom-free, simple and low-cost fabrication approach utilizing a laser-cut tape for rapidly patterning slurry-like elastomer composites. A conductive polydimethylsiloxane (PDMS) composite was chosen for demonstration in this paper due to its wide use of sensing and heating in many applications. Two fabrication schemes were developed: embedding in a PDMS matrix and relieving on ...
متن کاملIon-implanted compliant and patternable electrodes for miniaturized dielectric elastomer actuators
This article presents metal ion implantation as an alternative technique to fabricate compliant electrodes for small-size dielectric elastomer actuators. When reducing the size of these actuators to below 1 cm, the ability to pattern the electrodes is added to the need for compliance. Metal ion implantation on Polydimethylsiloxane (PDMS) layers allows the creation of conductive and compliant el...
متن کامل